Expansion of Basal Plane Dislocation in 4H-SiC Epitaxial Layer on A-Plane by Electron Beam Irradiation

Masaki Sudo, Yukari Ishikawa, Yong Zhao Yao, Yoshihiro Sugawara, Masashi Kato
  • Materials Science Forum, June 2018, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/msf.924.151

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The following have contributed to this page: Masashi Kato and Dr. Yongzhao YAO