What is it about?
Nanoscale components exhibit extreme behavior in pilot studies ranging from ultrasensitive detectors to high-efficiency light sources. This constitutes a tremendous potential for disruptive technologies. However, the main obstacle to transforming such prototypes to products is the lack of fabrication technologies spanning the large and the small in a consistent manner. This review discusses promising approaches for the integration or concurrent fabrication of micro and nanoscale components.
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Why is it important?
This work provides a broad overview of fabrication technologies utilized to integrate nanowires and nanotubes with microelectromechanical systems (MEMS) leading to enhanced functionality. This is an active research area, where commercial products such as inertial sensors have only recently emerged. For each technology ample detail is included regarding processing steps. In addition, the review highlights major applications of each technology to shed light on its capabilities and limitations.
Read the Original
This page is a summary of: Integration of one-dimensional nanostructures with microsystems: an overview, International Materials Reviews, September 2009, Taylor & Francis,
DOI: 10.1179/174328009x411190.
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Resources
Guided self-assembly of metallic nanowires and channels
A method for the batch-compatible fabrication of metallic nanowires.
Self-assembly-based batch fabrication of nickel-iron nanowires by electroplating
Demonstration of yield and batch-compatibility of the technique of crack filling with a case study on NiFe.
Microgrippers: a case study for batch-compatible integration of MEMS with nanostructures
A case study on MEMS-nanowire integration.
Monolithic integration of silicon nanowires with a microgripper
Another example of MEMS-nanowire integration.
Deterministic assembly of channeling cracks as a tool for nanofabrication
Modeling of the stress-guided assembly of cracks for batch-compatible integration of nanowires with MEMS.
Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch applications
Top-down fabrication of silicon nanowires with ease of integration.
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