What is it about?

This paper introduces the first reflective deep ultraviolet (193 nm) Fourier ptychographic microscope capable of reconstructing nanoscale images for characterization of sub-100 nm reflective features and devices. To our performance evaluation, the microscope is able to image nanoscale features with a resolution of 1.4 times higher and a contrast of 6 times higher than conventional deep ultraviolet microscope.

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Why is it important?

Comparing to visible Fourier ptychography with limited resolution and to EUV or X-ray Fourier ptychography with limited optics, the DUV Fourier ptychography has both high resolution and capability of optical implementation with reflective/refractive elements, which can find the way to advanced optical microscopy such as super-resolution, 3D imaging, or phase imaging microscopy for measurements in deep-subwavelength (sub-20 nm) regime.

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This page is a summary of: High numerical aperture reflective deep ultraviolet Fourier ptychographic microscopy for nanofeature imaging, APL Photonics, September 2022, American Institute of Physics, DOI: 10.1063/5.0102413.
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