What is it about?

ALD is used in electronic industry to deposit very thin films of material on silicon wafers to make computer chips. We want to use the technique to make catalysts on oxide powders. We can't directly transfer the known processes from electronics to catalysis research. Our new tools help us to make this transfer fast and easy.

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Why is it important?

Catalysts are widely used by the chemical industry, 85 % of chemicals are produced via catalysis. And those heterogeneous catalysts are often supported on oxide powders. ALD can be a way to make new catalysts or modify known catalysts.


I am now working in the field of catalyst synthesis, but I am a technical chemist, at the interface between chemist and engineers. I really enjoy designing and building reactors and anayltical set-ups.

Raoul Naumann d'Alnoncourt
Technische Universitat Berlin

Read the Original

This page is a summary of: Toolbox for atomic layer deposition process development on high surface area powders, Review of Scientific Instruments, February 2021, American Institute of Physics,
DOI: 10.1063/5.0037844.
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