Development of the sputtering yields of ArF photoresist after the onset of argon ion bombardment

Takuya Takeuchi, Carles Corbella, Simon Grosse-Kreul, Achim von Keudell, Kenji Ishikawa, Hiroki Kondo, Keigo Takeda, Makoto Sekine, Masaru Hori
  • Journal of Applied Physics, January 2013, American Institute of Physics
  • DOI: 10.1063/1.4772996
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The following have contributed to this page: Dr Kenji Ishikawa