Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films

Marina Prenzel, Teresa de los Arcos, Annika Kortmann, Jörg Winter, Achim von Keudell
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4767383
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The following have contributed to this page: Dr Teresa de los Arcos