Current affiliation: Aalto-yliopistoSubject speciality: Materials SciencePrimary location: Finland
Published in:RSC AdvancesPublication date:2014-08-12
In the paper you can read about a new test method for interfacial mechanical testing of especially atomic layer deposited (ALD) thin films. The tes...
Published in:Surface and Coatings TechnologyPublication date:2014-11-01
Published in:Colloids and Surfaces A Physicochemical and Engineering AspectsPublication date:2013-10-01
Published in:Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsPublication date:2014-01-01
Published in:Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsPublication date:2013-01-01
Published in:Thin Solid FilmsPublication date:2014-02-01
In this work a comprehensive characterization of the stress, elastic modulus, hardness and adhesion of ALD aluminum oxide (Al2O3) films grown at 11...
Published in:2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)Publication date:2014-10-01
Different (nano-/micro-)mechanical characterization methods of atomic layer deposited micro- and nanostructures were presented in this paper. The b...
Published in:WearPublication date:2015-11-01
Published in:Key Engineering MaterialsPublication date:2016-01-01