What is it about?
Different (nano-/micro-)mechanical characterization methods of atomic layer deposited micro- and nanostructures were presented in this paper. The basic system uses a fully-programmable micro-robotic assembly in combination with force sensors to study different structures mainly by pushing.
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Why is it important?
The programmability and the controllability of the micro-robotic assembly increases the repeatability and reliability of the measurements and enables precise characterization of micro- and nanosctructures.
Perspectives
My work in this paper involved the interfacial mechanical testing of atomic layer deposited thin films by using embedded microspheres. The method was first presented in http://dx.doi.org/10.1116/1.4827197 and further developed in http://dx.doi.org/10.1039/c4ra05807k.
Mr Jussi Lyytinen
Aalto-yliopisto
Read the Original
This page is a summary of: Characterization of nano-coated micro- and nanostructures by pushing, October 2014, Institute of Electrical & Electronics Engineers (IEEE),
DOI: 10.1109/3m-nano.2014.7057329.
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