All Stories

  1. Measuring SAQP pitch walk using OCD

    Article • Journal of Micro/Nanolithography MEMS and MOEMS, October 2016, SPIE

    Taher Kagalwala

  2. Scatterometry-based metrology for SAQP pitch walking using virtual reference

    Article • March 2016, SPIE

    Taher Kagalwala

  3. A Combined Gas Cluster Ion Beam (GCIB) and Chemical-Mechanical Polish (CMP) Planarization Scheme for Tungsten Replacement Metal Gate (W-RMG)

    Article • ECS Journal of Solid State Science and Technology, January 2016, The Electrochemical Society

    Taher Kagalwala

  4. Integrated metrology's role in Gas Cluster Ion Beam etch

    Article • May 2015, Institute of Electrical & Electronics Engineers (IEEE)

    Taher Kagalwala

  5. Leveraging advanced data analytics, machine learning, and metrology models to enable critical dimension metrology solutions for advanced integrated circuit nodes

    Article • Journal of Micro/Nanolithography MEMS and MOEMS, December 2014, SPIE

    Taher Kagalwala

  6. MBIR characterization of Photosensitive Polyimide in high volume manufacturing

    Article • May 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Taher Kagalwala

  7. Leveraging data analytics, patterning simulations and metrology models to enhance CD metrology accuracy for advanced IC nodes

    Article • April 2014, SPIE

    Taher Kagalwala