This shareable PDF can be hosted on any platform or network and is fully compliant with publisher copyright.
This publication has not yet been explained in plain language by the author(s). However, you can still read the publication.
If you are one of the authors, claim this publication so you can create a plain language summary to help more people find, understand and use it.
This page is a summary of: Leveraging advanced data analytics, machine learning, and metrology models to enable critical dimension metrology solutions for advanced integrated circuit nodes, Journal of Micro/Nanolithography MEMS and MOEMS, December 2014, SPIE,
DOI: 10.1117/1.jmm.13.4.041415.
You can read the full text:
The following have contributed to this page
