Lifetime amelioration of release-agent-free antireflection-structured replica molds by partial-filling ultraviolet nanoimprint lithography

Nurhafizah Binti Abu Talip[a]Yusof, Tatsuya Hayashi, Jun Taniguchi, Shin Hiwasa
  • Japanese Journal of Applied Physics, May 2015, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.54.06fm04

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http://dx.doi.org/10.7567/jjap.54.06fm04

The following have contributed to this page: Dr Jun Taniguchi