Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH Solutions

Masashi Kato, Masaya Ichimura, Eisuke Arai, P. Ramasamy
  • Materials Science Forum, January 2003, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/msf.433-436.665

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http://dx.doi.org/10.4028/www.scientific.net/msf.433-436.665

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