Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH Solutions

Masashi Kato, Masaya Ichimura, Eisuke Arai, P. Ramasamy
  • Materials Science Forum, January 2003, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/msf.433-436.665

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication


The following have contributed to this page: Masashi Kato