Release Properties and Durability of Release Layer on UV Nanoimprint Lithography

Jun Taniguchi, Yasuhiro Kamiya, Takeshi Ohsaki, Nobuji Sakai
  • Journal of Photopolymer Science and Technology, January 2009, Technical Association of Photopolymers, Japan
  • DOI: 10.2494/photopolymer.22.175

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The following have contributed to this page: Dr Jun Taniguchi