Filling Behavior Observation on UV Nanoimprint Lithography

Noriyuki Unno, Kazutomo Osari, Ken-ichi Machinaga, Jun Taniguchi, Takeshi Ohsaki, Nobuji Sakai
  • Journal of Photopolymer Science and Technology, January 2009, Technical Association of Photopolymers, Japan
  • DOI: 10.2494/photopolymer.22.161

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http://dx.doi.org/10.2494/photopolymer.22.161

The following have contributed to this page: Dr Jun Taniguchi