Microstructure Analysis of Diamond-Like Carbon Produced by Focused Ion Beam Assisted Chemical Vapor Deposition

Naomichi SAKAMOTO, Yasuo KOGO, Takuya YASUNO, Takahiro YAGI, Jun TANIGUCHI, Iwao MIYAMOTO
  • Journal of the Japan Society for Precision Engineering Contributed Papers, January 2005, Japan Society for Precision Engineering
  • DOI: 10.2493/jspe.71.1383

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http://dx.doi.org/10.2493/jspe.71.1383

The following have contributed to this page: Dr Jun Taniguchi