FIB‐CVD法によるDLC成形プロセスとその特性評価

Yasuo KOGO, Naomichi SAKAMOTO, Takahiro YAGI, Takuya YASUNO, Jun TANIGUCHI, Iwao MIYAMOTO
  • Journal of the Society of Materials Science Japan, January 2005, Society of Materials Science, Japan
  • DOI: 10.2472/jsms.54.987

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http://dx.doi.org/10.2472/jsms.54.987

The following have contributed to this page: Dr Jun Taniguchi