Dislocation Networks Strain Fields Induced By Si Wafer Bonding.

J. Eymery, F. Fournel, K. Rousseau, D. Buttard, F. Leroy, F. Rieutord, J.L. Rouvière
  • MRS Proceedings, January 2001, Cambridge University Press
  • DOI: 10.1557/proc-673-p6.9

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The following have contributed to this page: Dr Joel Eymery