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This page is a summary of: 超並列電子線描画装置用アクティブマトリックスナノ結晶シリコン電子源の開発と動作特性評価に関するレビュー, IEEJ Transactions on Sensors and Micromachines, January 2015, Institute of Electrical Engineers of Japan (IEE Japan),
DOI: 10.1541/ieejsmas.135.221.
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