All Stories

  1. Development of a MEMS electrostatic condenser lens array for nc-Si surface electron emitters of the Massive Parallel Electron Beam Direct-Write system

    Article • March 2016, SPIE

    Professor Kentaro Totsu

  2. Development of ballistic hot electron emitter and its applications to parallel processing: active-matrix massive direct-write lithography in vacuum and thin-film deposition in solutions

    Article • Journal of Micro/Nanolithography MEMS and MOEMS, September 2015, SPIE

    Professor Kentaro Totsu

  3. Free-standing subwavelength grid infrared cut filter of 90mm diameter for LPP EUV light source

    Article • Sensors and Actuators A Physical, July 2015, Elsevier

    Professor Kentaro Totsu

  4. Hermetic Seal Bonding at Low-temperature with Sub-micron Gold Particles for Wafer Level Packaging

    Article • IMAPSource Proceedings, January 2015, International Microelectronics and Packaging Society (IMAPS)

    Professor Kentaro Totsu

  5. An LSI for Massive Parallel Electron Beam Lithography: Its Design and Evaluation

    Article • IEEJ Transactions on Sensors and Micromachines, January 2015, Institute of Electrical Engineers of Japan (IEE Japan)

    Professor Kentaro Totsu

  6. 超並列電子線描画装置用アクティブマトリックスナノ結晶シリコン電子源の開発と動作特性評価に関するレビュー

    Article • IEEJ Transactions on Sensors and Micromachines, January 2015, Institute of Electrical Engineers of Japan (IEE Japan)

    Professor Kentaro Totsu

  7. Free-standing subwavelength grid infrared rejection filter of 90 MM diameter for LPP EUV light source

    Article • January 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Professor Kentaro Totsu

  8. Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process

    Article • August 2013, Institute of Electrical & Electronics Engineers (IEEE)

    Professor Kentaro Totsu

  9. Tactile display using shape memory alloy micro-coil actuator and magnetic latch mechanism

    Article • Displays, April 2013, Elsevier

    Professor Kentaro Totsu

  10. Low-Stress Epitaxial Polysilicon Process for Micromirror Devices

    Article • IEEJ Transactions on Sensors and Micromachines, January 2013, Institute of Electrical Engineers of Japan (IEE Japan)

    Professor Kentaro Totsu

  11. DEVELOPMENT OF ULTRA-MINIATURE FIBER-OPTIC PRESSURE SENSOR

    Article • November 2006, World Scientific Pub Co Pte Lt

    Professor Kentaro Totsu

  12. ENHANCED ELECTRON EMISSION USING INDIUM TIN OXIDE/SILICON MONOXIDE/GOLD STRUCTURE

    Article • November 2006, World Scientific Pub Co Pte Lt

    Professor Kentaro Totsu

  13. Fabrication of three-dimensional microstructure using maskless gray-scale lithography

    Article • Sensors and Actuators A Physical, August 2006, Elsevier

    Professor Kentaro Totsu

  14. Minimally invasive diagnostics and treatment using micro/nano machining

    Article • Minimally Invasive Therapy & Allied Technologies, January 2006, Taylor & Francis

    Professor Kentaro Totsu

  15. Dynamic Braille display using SMA coil actuator and magnetic latch

    Article • Sensors and Actuators A Physical, April 2005, Elsevier

    Professor Kentaro Totsu

  16. Electron Emission from Indium Tin Oxide/Silicon Monoxide/Gold Structure

    Article • Japanese Journal of Applied Physics, March 2005, Japan Society of Applied Physics

    Professor Kentaro Totsu

  17. Optical MEMS for Minimally Invasive Therapy

    Article • The Review of Laser Engineering, January 2005, Laser Society of Japan

    Professor Kentaro Totsu

  18. Gray-scale photolithography using maskless exposure system

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, January 2005, American Vacuum Society

    Professor Kentaro Totsu

  19. MEMS fiber optic pressure sensor

    Article • Journal of Micromechanics and Microengineering, October 2004, Institute of Physics Publishing

    Professor Kentaro Totsu

  20. Three-axis magneto-impedance effect sensor system for detecting position and orientation of catheter tip

    Article • Sensors and Actuators A Physical, March 2004, Elsevier

    Professor Kentaro Totsu

  21. Active Catheter Using Shape Memory Alloy for Treatment of Intestinal Obstruction

    Article • Journal of Japan Society of Computer Aided Surgery, January 2004, The Japan Society of Computer Aided Surgery

    Professor Kentaro Totsu

  22. Sensor Development for Occlusal Force and Relative Position

    Article • IEEJ Transactions on Sensors and Micromachines, January 2000, Institute of Electrical Engineers of Japan (IEE Japan)

    Professor Kentaro Totsu

  23. Magnetic sensor system for detecting position and orientation of a catheter tip

    Article • IEEJ Transactions on Sensors and Micromachines, January 2000, Institute of Electrical Engineers of Japan (IEE Japan)

    Professor Kentaro Totsu

  24. Vacuum sealed ultra miniature fiber-optic pressure sensor using white light interferometry

    Article • Institute of Electrical & Electronics Engineers (IEEE)

    Professor Kentaro Totsu

  25. Gray-scale lithography using mask-less exposure system

    Article • Institute of Electrical & Electronics Engineers (IEEE)

    Professor Kentaro Totsu

  26. Piezoelectric 2D microscanner for precise laser treatment in the human body

    Article • Institute of Electrical & Electronics Engineers (IEEE)

    Professor Kentaro Totsu

  27. Active bending ileus tube using shape memory alloy for treatment of intestinal obstruction

    Article • Institute of Electrical & Electronics Engineers (IEEE)

    Professor Kentaro Totsu

  28. Tactile Display for 2-D and 3-D Shape Expression Using SMA Micro Actuators

    Article • Institute of Electrical & Electronics Engineers (IEEE)

    Professor Kentaro Totsu