Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography

Kohei Goto, Jun Taniguchi
  • Advanced Optical Technologies, June 2019, De Gruyter
  • DOI: 10.1515/aot-2019-0017

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http://dx.doi.org/10.1515/aot-2019-0017

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