Etching characteristics of a silicon surface induced by focused ion beam irradiation

Noritaka Kawasegi, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Kiwamu Ashida, Jun Taniguchi, Iwao Miyamoto, Sadao Momota
  • International Journal of Manufacturing Technology and Management, January 2006, Inderscience Publishers
  • DOI: 10.1504/ijmtm.2006.009984

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http://dx.doi.org/10.1504/ijmtm.2006.009984

The following have contributed to this page: Dr Jun Taniguchi