3D Micro-Fabrication using Combination Technique of Nano-Scale Processing and Chemical Etching (2nd Report, Possibility of 3D Micro-Fabrication using Focused Ion Beam Process)

Noritaka KAWASEGI, Koichi SHIBATA, Noboru MORITA, Kiwamu ASHIDA, Jun TANIGUCHI, Iwao MIYAMOTO
  • TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C, January 2004, Japan Society of Mechanical Engineers
  • DOI: 10.1299/kikaic.70.2541

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http://dx.doi.org/10.1299/kikaic.70.2541

The following have contributed to this page: Dr Jun Taniguchi