Three-Dimensional Nanofabrication Utilizing Selective Etching of Silicon Induced by Focused Ion Beam Irradiation

Noritaka KAWASEGI, Noboru MORITA, Shigeru YAMADA, Noboru TAKANO, Tatsuo OYAMA, Kiwamu ASHIDA, Jun TANIGUCHI, Iwao MIYAMOTO
  • JSME International Journal Series C, January 2006, Japan Society of Mechanical Engineers
  • DOI: 10.1299/jsmec.49.583

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http://dx.doi.org/10.1299/jsmec.49.583

The following have contributed to this page: Dr Jun Taniguchi