Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD

Naomichi SAKAMOTO, Yasuo KOGO, Takuya YASUNO, Jun TANIGUCHI, Iwao MIYAMOTO
  • JSME International Journal Series A, January 2005, Japan Society of Mechanical Engineers
  • DOI: 10.1299/jsmea.48.275

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http://dx.doi.org/10.1299/jsmea.48.275

The following have contributed to this page: Dr Jun Taniguchi