Simulation and Characterization of the Strain Induced by an Original "Embedded Buried Nitride" Technique

Jean-Charles Barbe, Olivier Faynot, Younes Lamrani, Christian Vizioz, Laurent Brevard, Herve Denis, Vincent Delaye, Francois Rieutord, Joel Eymery, Sophie Baudot, Francois Andrieu, Marek Kostrzewa, Julie Widiez
  • January 2009, The Electrochemical Society
  • DOI: 10.1149/1.3117390

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http://dx.doi.org/10.1149/1.3117390

The following have contributed to this page: Dr Joel Eymery