Controlled Silicon (001) Surface Periodic Nanopatterning by Direct Wafer Bonding

Alexis Bavard, Jéro^me Mézière, Frank Fournel, Alina Pascale, Pascal Gentile, Joel Eymery
  • January 2006, The Electrochemical Society
  • DOI: 10.1149/1.2357076

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http://dx.doi.org/10.1149/1.2357076

The following have contributed to this page: Dr Joel Eymery