Thermal Evolution of Implantation Damages in Mg-Implanted GaN Layers Grown on Si

Aurélien Lardeau-Falcy, Marianne Coig, Matthew Charles, Christophe Licitra, Joël Kanyandekwe, Frederic Milesi, Joel Eymery, Frédéric Mazen
  • ECS Transactions, August 2017, The Electrochemical Society
  • DOI: 10.1149/08007.0131ecst

Thermal Evolution of Implantation Damages in Mg-Implanted GaN Layers Grown on Si

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http://dx.doi.org/10.1149/08007.0131ecst

The following have contributed to this page: Dr Joel Eymery