Improved tangent space based distance metric for accurate lithographic hotspot classification

Jing Guo, Fan Yang, Subarna Sinha, Charles Chiang, Xuan Zeng
  • January 2012, ACM (Association for Computing Machinery)
  • DOI: 10.1145/2228360.2228577

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http://dx.doi.org/10.1145/2228360.2228577

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