Fabrication of Low Line Edge Roughness Mold by Spin On Glass (SOG) Replica Method

Yuichi Kurashima, Hiroshi Hiroshima, Masanori Komuro, Naoto Yamazaki, Jun Taniguchi, Iwao Miyamoto
  • Japanese Journal of Applied Physics, July 2005, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.44.5617

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http://dx.doi.org/10.1143/jjap.44.5617

The following have contributed to this page: Dr Jun Taniguchi