Evaluation of Line Edge Roughness in Nanoimprint Lithography Using Photocurable Polymer

Yuichi Kurashima, Masanori Komuro, Hiroshi Hiroshima, Jun Taniguchi, Iwao Miyamoto
  • Japanese Journal of Applied Physics, June 2003, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.42.3871

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http://dx.doi.org/10.1143/jjap.42.3871

The following have contributed to this page: Dr Jun Taniguchi