Elimination of Pattern Defects of Nanoimprint under Atmospheric Conditions

Hiroshi Hiroshima, Masanori Komuro, Nobuyuki Kasahara, Yuichi Kurashima, Jun Taniguchi
  • Japanese Journal of Applied Physics, June 2003, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.42.3849

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http://dx.doi.org/10.1143/jjap.42.3849

The following have contributed to this page: Dr Jun Taniguchi