Direct Etching of Spin-on-Glass Films Exposed Using Synchrotron Radiation

Jun Taniguchi, Kazuhiro Kanda, Yuichi Haruyama, Shinji Matsui, Makoto Tokunaga, Iwao Miyamoto
  • Japanese Journal of Applied Physics, June 2002, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.41.4304

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http://dx.doi.org/10.1143/jjap.41.4304

The following have contributed to this page: Dr Jun Taniguchi