Measurement of Adhesive Force Between Mold and Photocurable Resin in Imprint Technology

Jun Taniguchi, Takeshi Kawasaki, Yuji Tokano, Yasuo Kogo, Iwao Miyamoto, Masanori Komuro, Hiroshi Hiroshima, Nobuji Sakai, Kentaro Tada
  • Japanese Journal of Applied Physics, June 2002, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.41.4194

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The following have contributed to this page: Dr Jun Taniguchi