Improvement of Imprinted Pattern Uniformity Using Sapphire Mold

Masanori Komuro, Yuji Tokano, Jun Taniguchi, Takeshi Kawasaki, Iwao Miyamoto, Hiroshi Hiroshima
  • Japanese Journal of Applied Physics, June 2002, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.41.4182

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http://dx.doi.org/10.1143/jjap.41.4182

The following have contributed to this page: Dr Jun Taniguchi