Preparation of Diamond Mold Using Electron Beam Lithography for Application to Nanoimprint Lithography

Jun Taniguchi, Yuji Tokano, Iwao Miyamoto, Masanori Komuro, Hiroshi Hiroshima, Kazuhiko Kobayashi, Takeshi Miyazaki, Hideyuki Ohyi
  • Japanese Journal of Applied Physics, December 2000, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.39.7070

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http://dx.doi.org/10.1143/jjap.39.7070

The following have contributed to this page: Dr Jun Taniguchi