Electron Beam Assisted Chemical Etching of Single-Crystal Diamond Substrates with Hydrogen Gas

Jun Taniguchi, Iwao Miyamoto, Naoto Ohno, Ken'ichi Kantani, Masanori Komuro, Hiroshi Hiroshima
  • Japanese Journal of Applied Physics, December 1997, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.36.7691

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The following have contributed to this page: Dr Jun Taniguchi