Electron Beam Assisted Chemical Etching of Single Crystal Diamond Substrates

Jun Taniguchi, Iwao Miyamoto, Naoto Ohno, Satoshi Honda
  • Japanese Journal of Applied Physics, December 1996, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.35.6574

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http://dx.doi.org/10.1143/jjap.35.6574

The following have contributed to this page: Dr Jun Taniguchi