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This page is a summary of: Position-Controlled Si Nanocrystals in a SiO2Thin Film Using a Novel Amorphous Si Ultra-Thin-Film “Nanomask” due to a Bio-Nanoprocess for Low-Energy Ion Implantation, Applied Physics Express, February 2008, Institute of Physics Publishing,
DOI: 10.1143/apex.1.034001.
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