Ultrasonic annealing of radiation defects in silicon

Artem Podolian, Oleg Korotchenkov
  • The Journal of the Acoustical Society of America, May 2008, Acoustical Society of America (ASA)
  • DOI: 10.1121/1.2935084

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http://dx.doi.org/10.1121/1.2935084

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