Three-dimensional hologram-read-only memory duplication by nanoimprint lithography

Noriyuki Unno, Shuhei Yoshida, Hideaki Akamatsu, Manabu Yamamoto, Shin-ichi Satake, Jun Taniguchi
  • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2013, American Vacuum Society
  • DOI: 10.1116/1.4821654

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http://dx.doi.org/10.1116/1.4821654

The following have contributed to this page: Dr Jun Taniguchi