High-density pattern transfer via roll-to-roll ultraviolet nanoimprint lithography using replica mold

Jun Taniguchi, Hiroshi Yoshikawa, Go Tazaki, Toshiyuki Zento
  • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2012, American Vacuum Society
  • DOI: 10.1116/1.4758922

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http://dx.doi.org/10.1116/1.4758922

The following have contributed to this page: Dr Jun Taniguchi