Large-diameter roll mold fabrication method using a small-diameter quartz roll mold and UV nanoimprint lithography

Jun Taniguchi, Noriyuki Unno, Hiroki Maruyama
  • January 2011, American Vacuum Society
  • DOI: 10.1116/1.3657524

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http://dx.doi.org/10.1116/1.3657524

The following have contributed to this page: Dr Jun Taniguchi