Fabrication of a seamless roll mold using inorganic electron beam resist with postexposure bake

Noriyuki Unno, Jun Taniguchi, Kiyoshi Ishikawa
  • January 2011, American Vacuum Society
  • DOI: 10.1116/1.3656052

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http://dx.doi.org/10.1116/1.3656052

The following have contributed to this page: Dr Jun Taniguchi