Macro-optical inspection method for deterioration evaluation of release-coated mold surfaces for nanoimprint lithography

Jun Taniguchi, Junki Takahashi, Mitsuru Uda, Atushi Kohayase, Kenichi Kotaki
  • January 2011, American Vacuum Society
  • DOI: 10.1116/1.3646885

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Dr Jun Taniguchi