Fabrication of nanodot array molds by using an inorganic electron-beam resist and a postexposure bake

Tetsuro Manabe, Jun Taniguchi, Kiyoshi Ishikawa
  • January 2009, American Vacuum Society
  • DOI: 10.1116/1.3253649

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http://dx.doi.org/10.1116/1.3253649

The following have contributed to this page: Dr Jun Taniguchi