Sub-100-nm three-dimensional nanoimprint lithography

Noriyuki Unno, Jun Taniguchi, Yoshiaki Ishii
  • January 2007, American Vacuum Society
  • DOI: 10.1116/1.2811715

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http://dx.doi.org/10.1116/1.2811715

The following have contributed to this page: Dr Jun Taniguchi