What is it about?
This paper explains the deposition of MAX-phases from compound targets.
Why is it important?
It shows that the quality of the target is important.
Read the Original
This page is a summary of: Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, March 2019, American Vacuum Society, DOI: 10.1116/1.5065468.
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