Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target

Martin Magnuson, Lina Tengdelius, Grzegorz Greczynski, Fredrik Eriksson, Jens Jensen, Jun Lu, Mattias Samuelsson, Per Eklund, Lars Hultman, Hans Högberg
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, March 2019, American Vacuum Society
  • DOI: 10.1116/1.5065468

Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films

What is it about?

This paper explains the deposition of MAX-phases from compound targets.

Why is it important?

It shows that the quality of the target is important.

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http://dx.doi.org/10.1116/1.5065468

The following have contributed to this page: Associate Prof. Martin Magnuson