What is it about?

This paper explains the deposition of MAX-phases from compound targets.

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Why is it important?

It shows that the quality of the target is important.

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This page is a summary of: Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, March 2019, American Vacuum Society,
DOI: 10.1116/1.5065468.
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