Three-Dimensional Measurements of Photo-curing Process With Photo-curable Resin for UV-Nanoimprint by Micro-digital-Holographic-PTV

Shin-ichi Satake, Gaku Sorimachi, Takahiro Kanai, Jun Taniguchi, Noriyuki Unno
  • Journal of Electronic Packaging, January 2010, ASME International
  • DOI: 10.1115/1.4001854

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http://dx.doi.org/10.1115/1.4001854

The following have contributed to this page: Dr Jun Taniguchi