Three-dimensional measurements of photo curing with process with photo-curable resin for UV-nanoimprint by micro-digital-holographic-PTV

Shin-ichi Satake, Gaku Sorimachi, Takahiro Kanai, Jun Taniguchi, Noriyuki Unno
  • December 2008, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/theta.2008.5167161

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http://dx.doi.org/10.1109/theta.2008.5167161

The following have contributed to this page: Dr Jun Taniguchi