Effect of RF sputtering parameters on PZT crystal growth

  • Miao Yu, Haixia Zhang, Tim Giffney, Kean Aw
  • April 2013, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/nems.2013.6559851

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http://dx.doi.org/10.1109/nems.2013.6559851

The following have contributed to this page: Kean Aw